Company Filing History:
Years Active: 2018-2025
Title: **Fuping Chen: Innovator in Substrate Cleaning Technologies**
Introduction
Fuping Chen, located in Shanghai, China, is an accomplished inventor with an impressive portfolio of 34 patents. His innovative work primarily focuses on methods and apparatus for cleaning substrates through advanced technologies involving high-temperature chemicals and ultrasonic devices.
Latest Patents
Among his latest contributions to the field, Fuping has developed two notable patents:
1. **Method and apparatus for cleaning substrates using high-temperature chemicals and ultrasonic device** - This patent outlines a comprehensive method for cleaning substrates that includes rotating the substrate and applying deionized water followed by a high-temperature chemical solution. The method incorporates changes in rotation speed of the substrate and the operation of an ultrasonic device across multiple cleaning cycles, ensuring thorough cleaning and drying of the substrate.
2. **Coater with automatic cleaning function and coater automatic cleaning method** - This invention describes a coater equipped with an automatic cleaning feature. The coater includes a chamber filled with cleaning solution, a substrate chuck for secure positioning, and a shroud that can toggle between preventing splashing and immersing the substrate for cleaning. The automatic cleaning method details an effective sequence whereby the cleaning solution is used to dissolve photoresist, followed by draining the solution to maintain a clean coater environment.
Career Highlights
Fuping Chen has made significant strides in his career, working for reputable companies such as ACM Research (Shanghai) Inc. and ACM Research, Inc. His roles in these organizations have allowed him to further refine his innovative approaches to substrate cleaning technologies.
Collaborations
Throughout his career, Fuping has collaborated with talented individuals, including coworkers Hui Wang and Xi Wang. Their collective expertise has played a vital role in pushing forward the boundaries of technology in their respective fields.
Conclusion
Fuping Chen stands out as a pivotal figure in the realm of substrate cleaning technology, thanks to his 34 patents and innovative spirit. His groundbreaking work not only highlights his capabilities as an inventor but also contributes significantly to advancements that enhance cleaning processes in various technological applications.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.