The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 08, 2024
Filed:
Oct. 26, 2020
Acm Research (Shanghai) Inc., Shanghai, CN;
Hui Wang, Shanghai, CN;
Fuping Chen, Shanghai, CN;
Wenjun Wang, Shanghai, CN;
Hongchao Yang, Shanghai, CN;
Voha Nuch, Shanghai, CN;
Fufa Chen, Shanghai, CN;
Jian Wang, Guangzhou, CN;
Xiaoyan Zhang, Shanghai, CN;
Shu Yang, Shanghai, CN;
ACM RESEARCH (SHANGHAI) INC., Shanghai, CN;
Abstract
A coater with automatic cleaning function and a coater automatic cleaning method. The coater () includes a coater chamber () capable of being filled up with cleaning solution, a substrate chuck () holding and positioning a substrate (), and at least one shroud () capable of moving up for preventing photoresist from splashing out of the coater chamber (), or moving down and immersing into the cleaning solution for cleaning. The coater () automatic cleaning method includes the following steps: turning off a liquid outlet valve (A,B,) of the coater (); filling up a coater chamber () with cleaning solution; after photoresist in the coater chamber () being dissolved into the cleaning solution, turning on the liquid outlet valve (A,B,) and draining the cleaning solution out of the coater chamber ().