Company Filing History:
Years Active: 2019-2025
Title: Innovator Spotlight: Wenjun Wang from Shanghai
Introduction
Wenjun Wang, an accomplished inventor based in Shanghai, China, has made significant contributions to the field of substrate cleaning and coating technology. With a portfolio of six patents, he continues to push the boundaries of innovation in his industry.
Latest Patents
Wang's most recent patents include a coater with an automatic cleaning function and a corresponding coater automatic cleaning method. This innovative coater features a chamber that can be filled with a cleaning solution and includes a substrate chuck for holding and positioning substrates. The design also incorporates at least one shroud, which can move to prevent photoresist from splashing out or immerse in the cleaning solution for effective cleaning. The automatic cleaning method consists of turning off the liquid outlet valves, filling the chamber with cleaning solution, dissolving photoresist into the solution, and finally draining it away.
Another notable invention from Wang is a substrate cleaning method and apparatus that employs gas-liquid atomization and TEBO megasonic technology to clean substrates efficiently. This method ensures the removal of both small and large particles from substrate surfaces while minimizing potential damage to the devices.
Career Highlights
Wenjun Wang is currently employed at Acm Research (Shanghai) Inc., where his expertise in innovative cleaning solutions is highly valued. His extensive experience and specialized knowledge have made significant impacts in enhancing manufacturing processes within the semiconductor industry.
Collaborations
Throughout his career, Wang has had the opportunity to collaborate with talented professionals, including colleagues like Hui Wang and Fuping Chen. These partnerships have contributed to the advancement of their shared goals in developing cutting-edge technologies.
Conclusion
Wenjun Wang's impressive portfolio and innovations in substrate cleaning and coating technology demonstrate his commitment to excellence and creativity as an inventor. With a strong foundation in research and development, he continues to inspire advancements that will shape the future of his industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.