The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2020
Filed:
Jul. 06, 2016
Acm Research (Shanghai) Inc., Shanghai, CN;
Fufa Chen, Shanghai, CN;
Zhiyou Fang, Shanghai, CN;
Jun Wu, Shanghai, CN;
Hui Wang, Shanghai, CN;
Fuping Chen, Shanghai, CN;
Wenjun Wang, Shanghai, CN;
ACM Research (Shanghai) Inc., Shanghai, CN;
Abstract
A substrate supporting apparatus () for cleaning a back side of a substrate () is provided. The substrate supporting apparatus () has a hollow shaft () and a rotary spindle (). The rotary spindle () is set in the hollow shaft () and a spacing is formed between an outer wall of the rotary spindle () and an inner wall of the hollow shaft (). The outer wall of the rotary spindle () defines a blocking wall () and a recess () to prevent particles in the spacing from entering a gas groove () which is formed on the hollow shaft () and supplies gas to a front side of the substrate (), avoiding the particles contaminating the front side of the substrate (), which improves the quality of semiconductor devices.