The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 07, 2026
Filed:
Aug. 20, 2021
Acm Research (Shanghai), Inc., Shanghai, CN;
Acm Research Korea Co., Ltd., Gyeong-gi-do, KR;
Cleanchip Technologies Limited, Hong Kong, CN;
Mark Lee, Gyeong-gi-do, KR;
Jun Wu, Shanghai, CN;
Hui Wang, Shanghai, CN;
Cheng Cheng, Shanghai, CN;
Andrew Jung, Gyeong-gi-do, KR;
Bruce Sohn, Gyeong-gi-do, KR;
Wenjun Wang, Shanghai, CN;
Qian Shao, Shanghai, CN;
Jun Wang, Shanghai, CN;
Deyun Wang, Shanghai, CN;
Yy Kim, Gyeong-gi-do, KR;
ACM RESEARCH (SHANGHAI), INC., Shanghai, CN;
ACM Research Korea CO., LTD., Gyeong-Gi-Do, KR;
CleanChip Technologies Limited, Hong Kong, CN;
Abstract
A coating and developing device comprises a front end module (), a process station (), and an interface station () that are successively connected, wherein the process station () comprises a coating unit (), a developing unit (), at least one transversely moving of mobile conveying part (), and at least one side robot (R). After a substrate has been processed in the coating unit (), the substrate is transferred to the mobile conveying part () by the at least one side robot (R), and the substrate is transferred to the interface station () by the mobile conveying part (). After the substrate has been processed in the developing unit (), the substrate is transferred to the mobile conveying part () by the at least one side robot (R), and the substrate is transferred to the front end module () by the mobile conveying part (). The mobile conveying part () and the side robot (R) are configured to be responsible for transferring the substrate between the front end module () and the interface station () reducing the operating load of the robot in the coating unit () or the developing unit (), and improving the throughput of the coating and developing device.