This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignees: Acm Research (Shanghai) Inc., Acm Research Korea Co., Ltd., Cleanchip Technologies Limited. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:

Years Active: 2026
Title: Qian Shao - Innovator in Coating and Developing Technology
Introduction
Qian Shao is a notable inventor based in Shanghai, China. He has made significant contributions to the field of coating and developing devices, showcasing his innovative spirit through his patented technology.
Latest Patents
Qian Shao holds a patent for a coating and developing device. This device comprises a front end module, a process station, and an interface station that are successively connected. The process station includes a coating unit, a developing unit, at least one transversely moving mobile conveying part, and at least one side robot. After a substrate has been processed in the coating unit, it is transferred to the mobile conveying part by the side robot, and subsequently to the interface station. After processing in the developing unit, the substrate is again transferred by the side robot to the mobile conveying part, which then moves it to the front end module. This innovative design reduces the operating load of the robot in the coating and developing units, thereby improving the throughput of the device. Qian Shao's patent is a testament to his ingenuity and understanding of complex manufacturing processes.
Career Highlights
Throughout his career, Qian Shao has worked with prominent companies in the industry. He has been associated with Acm Research (Shanghai) Inc. and Acm Research Korea Co., Ltd. His experience in these organizations has allowed him to refine his skills and contribute to advancements in technology.
Collaborations
Qian Shao has collaborated with notable professionals in his field, including Mark Lee and Jun Wu. These collaborations have likely enriched his work and fostered innovation in the projects he has undertaken.
Conclusion
Qian Shao is a distinguished inventor whose work in coating and developing devices has made a significant impact in the industry. His innovative patent and career achievements reflect his dedication to advancing technology.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile