Location History:
- Beijing, CN (2011)
- Shanghai, CN (2014 - 2020)
Company Filing History:
8 out of 164,197 
2 out of 65 
Years Active: 2011-2024
Title: Innovations by Shu Qing Yang
Introduction
Shu Qing Yang is a prominent inventor based in Beijing, China. He has made significant contributions to the field of coating technology, particularly with his innovative designs and methods. With a total of 10 patents to his name, Yang continues to push the boundaries of what is possible in his area of expertise.
Latest Patents
One of his latest patents is a coater with an automatic cleaning function. This invention includes a coater chamber capable of being filled with a cleaning solution, a substrate chuck for holding and positioning a substrate, and at least one shroud that can move up to prevent photoresist from splashing out of the coater chamber. The shroud can also move down to immerse into the cleaning solution for effective cleaning. The automatic cleaning method involves several steps: turning off the liquid outlet valve of the coater, filling the coater chamber with cleaning solution, and after the photoresist has dissolved, turning on the liquid outlet valve to drain the cleaning solution.
Career Highlights
Shu Qing Yang has worked with notable companies such as IBM and ACM Research (Shanghai) Inc. His experience in these organizations has allowed him to refine his skills and contribute to various innovative projects.
Collaborations
Yang has collaborated with several talented individuals, including Yao Ma and Hui Gu, who have contributed to his work and innovations.
Conclusion
Shu Qing Yang's contributions to the field of coating technology are noteworthy, and his inventions continue to influence the industry. His dedication to innovation is evident in his numerous patents and collaborations.