The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 27, 2024
Filed:
Feb. 07, 2018
Applicant:
Acm Research (Shanghai) Inc., Shanghai, CN;
Inventors:
Hui Wang, Shanghai, CN;
Xi Wang, Shanghai, CN;
Fuping Chen, Shanghai, CN;
Xiaoyan Zhang, Shanghai, CN;
Fufa Chen, Shanghai, CN;
Assignee:
ACM RESEARCH (SHANGHAI), INC., Shanghai, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 3/12 (2006.01); B08B 3/08 (2006.01); H01L 21/02 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
B08B 3/12 (2013.01); B08B 3/08 (2013.01); H01L 21/02057 (2013.01); H01L 21/67051 (2013.01); H01L 21/67098 (2013.01); B08B 2220/00 (2013.01); B08B 2240/00 (2013.01);
Abstract
The present invention provides a method for cleaning substrates comprising the steps of: placing a substrate on a substrate holder; implementing a bubble less or bubble-free pre-wetting process for the substrate; and implementing an ultra/mega sonic cleaning process for cleaning the substrate.