The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2024
Filed:
Apr. 20, 2022
Applicant:
Acm Research (Shanghai) Inc., Shanghai, CN;
Inventors:
Assignee:
ACM RESEARCH (SHANGHAI), INC., Shanghai, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); B08B 3/12 (2006.01); H01L 21/673 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0206 (2013.01); B08B 3/12 (2013.01); H01L 21/02101 (2013.01); B08B 2240/00 (2013.01); H01L 21/673 (2013.01);
Abstract
A method for cleaning semiconductor wafer includes putting at least one wafer on a cassette bracket in a first cleaning tank filled with chemical solution; after said wafers have been processed in the first cleaning tank, transferring the wafers from the first cleaning tank to a second cleaning tank with the wafers immersing in the chemical solution; and after said wafers have been processed in the second cleaning tank, taking the wafers out of the second cleaning tank.