Foster City, CA, United States of America

Chiu Chan

USPTO Granted Patents = 15 

Average Co-Inventor Count = 7.1

ph-index = 6

Forward Citations = 170(Granted Patents)


Company Filing History:


Years Active: 2002-2021

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15 patents (USPTO):

Title: The Innovative Work of Inventor Chiu Chan in Wafer Technology

Introduction

Chiu Chan is a prominent inventor based in Foster City, California, known for his significant contributions to the field of semiconductor manufacturing. With a remarkable portfolio of 15 patents, Chan has made a notable impact on the industry, particularly through his innovations in wafer technology.

Latest Patents

One of Chiu Chan's latest patents is focused on the development of a shadow ring for modifying wafer edge and bevel deposition. This inventive shadow ring enables increased or decreased deposition on the edge of a wafer, yielding more uniform coverage. By strategically removing material from both the top and bottom surfaces of the shadow ring, enhancements in edge deposition and bevel coverage can be achieved. The design includes a recessed slot on the bottom surface, allowing for better management of the deposition process. An interesting aspect of Chan’s invention is the ability to adjust the inner diameter of the shadow ring, further enhancing the deposition capabilities at the wafer's edge. The diverse materials used to construct the shadow ring also play a crucial role in modifying the deposition characteristics.

Career Highlights

Throughout his career, Chiu Chan has demonstrated a commitment to advancing technology in the semiconductor industry. His work at Applied Materials, Inc. has led to innovative solutions that address critical challenges faced in wafer manufacturing. With 15 patents to his name, Chan stands out as a thought leader in his field, continually pushing the boundaries of what is possible with cutting-edge technology.

Collaborations

Chiu Chan has had the opportunity to collaborate with talented colleagues, including Martin Jay Seamons and Sudha S Rathi. These partnerships have fostered an exchange of ideas and expertise, further enriching the innovative landscape within which Chan operates.

Conclusion

Chiu Chan exemplifies the spirit of innovation that drives the semiconductor industry forward. His contributions, especially through his latest patent on the shadow ring for wafer edge and bevel deposition, underscore his status as a leading inventor. As technology continues to evolve, Chan’s ongoing work will undoubtedly pave the way for future advancements in semiconductor manufacturing.

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