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Hsinchu, Taiwan

Chih-Teng Liao

This inventor holds 67 USPTO granted patents and 40 published patent applications, primarily in Semiconductor Technology. Top assignees: Taiwan Semiconductor Manufacturing Comp. Ltd., Taiwan Semiconductor Manufacturing Co., Ltd.. Active years: 2017-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Chih-Teng Liao. Retrieved from https://idiyas.com/inventor/chih-teng-liao

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 67 

% Patents Active = 98.5

Average Co-Inventor Count = 4.2

ph-index = 5

Forward Citations = 300(Granted Patents)

Forward Citations (Not Self Cited) = 255(Dec 10, 2025)


Company Filing History:

goldMedal66 out of 42,872 
 
Taiwan Semiconductor Manufacturing Comp. Ltd.
 patents
silverMedal1 out of 481 
 
Taiwan Semiconductor Manufacturing Co., Ltd.
 patents

Years Active: 2017-2026

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Areas of Expertise:
Semiconductor Device
Plasma Processing
Transistor Gate
Etching Method
Contact Resistance
High-Mobility Transistors
Wafer Fabrication
Dummy Gate Structure
Dry Etcher
CD Uniformity
Source and Drain Structures
Polysilicon Etch
67 patents (USPTO):Explore Patents
1. 12689011 - Apparatus with heated filter and operation method of the same (2026-07-21),
2. 12641812 - Method of manufacturing a semiconductor device and a semiconductor device (2026-05-26),
3. 12588243 - Semiconductor device structure and methods of forming the same (2026-03-24),
4. 12563828 - Fin height and STI depth for performance improvement in semiconductor devices having high-mobility p-channel transistors (2026-02-24),
5. 12531217 - Laser array system for improved local CD uniformity (2026-01-20),
6. 12488968 - Semiconductor processing tool and methods of operation (2025-12-02),
7. 12453168 - Semiconductor device with short-resistant capacitor plate (2025-10-21),
8. 12438045 - Semiconductor structure formation (2025-10-07),
9. 12433018 - Extended side contacts for transistors and methods forming same (2025-09-30),
10. 12432955 - Source and drain structure with reduced contact resistance and enhanced mobility (2025-09-30),
11. 12424568 - Method for forming recesses in a substrate by etching dummy fins (2025-09-23),
12. 12402386 - Transistor gate structure and process (2025-08-26),
13. 12362238 - Metal gate process and related structure (2025-07-15),
14. 12356710 - Fin height and STI depth for performance improvement in semiconductor devices having high-mobility p-channel transistors (2025-07-08),
15. 12334314 - Dry etcher uniformity control by tuning edge zone plasma sheath (2025-06-17),

Title: Innovations of Chih-Teng Liao in Semiconductor Technology

Introduction

Chih-Teng Liao, a prominent inventor based in Hsinchu, Taiwan, has made remarkable contributions to the semiconductor industry. With a total of 47 patents to his name, Liao is renowned for his innovative methodologies that enhance semiconductor wafer fabrication processes.

Latest Patents

Among his latest patents, one notable invention is the "Plasma Control Method in Semiconductor Wafer Fabrication." This method outlines a process that involves placing a semiconductor wafer on a wafer chuck within a process chamber and adjusting the distance between a gas dispenser and an upper edge ring. By exciting the gas dispenser, plasma is produced to effectively process the wafer, culminating in the removal of the wafer from the chamber. Additionally, Liao has patented a "Method for Manufacturing Semiconductor Device," which includes forming a material layer over a semiconductor substrate, creating spacer masks, and employing an atomic layer etching (ALE) process to pattern the material layer before etching the substrate.

Career Highlights

Chih-Teng Liao is currently associated with Taiwan Semiconductor Manufacturing Company (TSMC), a global leader in semiconductor manufacturing. Throughout his career, Liao has demonstrated an exceptional ability to innovate, significantly advancing techniques in semiconductor fabrication.

Collaborations

In his research endeavors, Liao has collaborated with fellow inventors Tzu-Chan Weng and Yi-Wei Chiu, contributing to advancements in semiconductor technology through shared expertise and innovative thinking.

Conclusion

Chih-Teng Liao's contributions to semiconductor innovation are evidenced by his extensive patent portfolio. His latest inventions illustrate his commitment to enhancing industry standards and improving fabrication processes, solidifying his status as a leading inventor in the field.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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