The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 21, 2026
Filed:
Aug. 03, 2023
Applicant:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;
Inventors:
Assignee:
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/32 (2006.01); B01D 46/42 (2006.01); C23C 16/44 (2006.01); C23C 16/50 (2006.01); H05B 1/02 (2006.01); H10P 50/24 (2026.01); H10P 50/26 (2026.01); H10P 50/28 (2026.01);
U.S. Cl.
CPC ...
H01J 37/32844 (2013.01); B01D 46/4263 (2013.01); C23C 16/4412 (2013.01); C23C 16/50 (2013.01); H01J 37/3244 (2013.01); H05B 1/023 (2013.01); B01D 2273/20 (2013.01); H10P 50/242 (2026.01); H10P 50/267 (2026.01); H10P 50/28 (2026.01);
Abstract
An apparatus includes a process chamber, a vacuum pump disposed downstream of the process chamber for discharging a fluid flow from the process chamber, a filter mounted between the process chamber and the vacuum pump for filtering the fluid flow, and a heating device disposed to heat the filter.