Location History:
- Gyeonggi-do, KR (2015)
- Yongin-si, KR (2017 - 2024)
Company Filing History:
9 out of 131,611 
3 out of 67 
1 out of 130 Years Active: 2015-2025
Title: Chawon Koh: Innovator in Semiconductor Manufacturing
Introduction
Chawon Koh is a prominent inventor based in Yongin-si, South Korea. He has made significant contributions to the field of semiconductor manufacturing, holding a total of nine patents. His innovative approaches have advanced the technology used in integrated circuit devices and semiconductor devices.
Latest Patents
One of his latest patents is a method of manufacturing a semiconductor device. This method involves forming a photoresist material layer on a lower film, which includes a crosslinking molecule with a molecular weight ranging from about 1,000 to about 4,000. The process includes exposing a partial region of the photoresist material layer, removing the unexposed portion to create a photoresist pattern, and processing the lower film using this pattern. The crosslinking molecule features a perfluoro alkyl moiety, which contains a carbon-fluorine bond that dissociates upon exposure.
Another notable patent is a method of manufacturing an integrated circuit device using a metal-containing photoresist composition. In this method, a photoresist layer is created by coating a photoresist composition on a substrate. A portion of the photoresist layer is then removed from the edge of the substrate, followed by processing the substrate with a main treatment composition that includes an organic solvent, acid, and water.
Career Highlights
Chawon Koh has worked with leading companies in the technology sector, including Samsung Electronics and Inpria Corporation. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in semiconductor technology.
Collaborations
Throughout his career, Chawon has collaborated with notable professionals in the field, including Hyunwoo Kim and Tsunehiro Nishi. These collaborations have further enriched his work and expanded the impact of his inventions.
Conclusion
Chawon Koh is a distinguished inventor whose work in semiconductor manufacturing has led to significant advancements in the industry. His innovative patents and collaborations with leading companies and professionals highlight his contributions to technology.