The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2023
Filed:
May. 04, 2022
Applicants:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inpria Corporation, Corvallis, OR (US);
Inventors:
Chawon Koh, Yongin-si, KR;
Tsunehiro Nishi, Seongnam-si, KR;
Brian Cardineau, Corvallis, OR (US);
Sangyoon Woo, Leuven, BE;
Jason Stowers, Corvallis, OR (US);
Soo Young Choi, Hwaseong-si, KR;
Assignees:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inpria Corporation, Corvallis, OR (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/11 (2006.01); H01L 21/027 (2006.01); H01L 21/311 (2006.01); G03F 7/20 (2006.01); G03F 7/32 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0042 (2013.01); G03F 7/11 (2013.01); G03F 7/2004 (2013.01); H01L 21/0274 (2013.01); H01L 21/31144 (2013.01); G03F 7/325 (2013.01);
Abstract
Provided herein are photoresist compositions and methods for fabricating semiconductor devices using the same. A photoresist composition may include an organometallic material, a fluorine-containing material, and an organic solvent.