The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Mar. 10, 2023
Samsung Electronics Co., Ltd., Suwon-si, KR;
Jin-Kyun Lee, Suwon-si, KR;
Chawon Koh, Suwon-si, KR;
Ye-Jin Ku, Suwon-si, KR;
Tsunehiro Nishi, Suwon-si, KR;
Hyunwoo Kim, Suwon-si, KR;
Hyung-Ju Ahn, Suwon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
INHA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION, Incheon, KR;
Abstract
A resist material is combined with a ligand containing four or more fluorine atoms and is represented by the following formula: [(RM)OX(OH)] (OH)R, wherein one of 'R' and “R” is CFH, CFHN, CFHP, CFHS, CFHO, CFHNS, CFHPS, CFHNO, or CFHPO, the other of “R” and “R” is CH, CFH, CFHN, CFHP, CFHS, CFHO, CFHNS, CFHPS, CFHNO, or CFHPO, “a” and “c” are each independently an integer of 0 to 20, “b” is an integer of 4 to 30, “d” and “e” are each independently an integer of 0 to 5, “M” is one metal selected from a specified list, “i” is an integer from 1 to 12, “j” is an integer of 1 to 14, “X” is a halogen selected from a specified list, “k” and “m” are each independently an integer of 0 to 6, and “n” and “p” are each independently an integer of 0 to 2.