Location History:
- Kaohsiung, TW (2013)
- Kaohsiung County, TW (2011 - 2014)
Company Filing History:
Years Active: 2011-2014
Title: Chao-An Su: Innovator in MEMS Technology
Introduction
Chao-An Su is a prominent inventor based in Kaohsiung County, Taiwan. He has made significant contributions to the field of micro electro mechanical systems (MEMS), holding a total of 12 patents. His work focuses on innovative methods for fabricating MEMS devices, particularly microphones.
Latest Patents
One of his latest patents is titled "Method of fabricating a MEMS microphone with trenches serving as vent pattern." This method involves providing a substrate with a first and second surface, which is divided into a logic region and a MEMS region. The first surface is etched to create multiple first trenches in the MEMS region, followed by the formation of an STI material in these trenches. The second surface is then etched to form a second trench that connects with the first trenches, ultimately leading to the removal of the STI material in the first trenches.
Another notable patent is "MEMS structure and method for making the same." This patent describes a MEMS structure that includes a backplate electrode and a 3D diaphragm electrode. The 3D diaphragm electrode features a composite structure with a dielectric layer situated between two metal layers. This innovative design allows the 3D diaphragm electrode to work in conjunction with the backplate electrode to form a variable capacitor.
Career Highlights
Chao-An Su is currently employed at United Microelectronics Corporation, where he continues to advance MEMS technology. His expertise in this field has led to numerous innovations that enhance the performance and functionality of MEMS devices.
Collaborations
Chao-An Su has collaborated with notable colleagues, including Tzung-I Su and Bang-Chiang Lan. These partnerships have contributed to the development of cutting-edge technologies in the MEMS sector.
Conclusion
Chao-An Su is a distinguished inventor whose work in MEMS technology has resulted in significant advancements and numerous patents. His innovative methods and collaborative efforts continue to shape the future of micro electro mechanical systems.
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