The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 29, 2014
Filed:
Nov. 19, 2009
Chien-hsin Huang, Taichung, TW;
Bang-chiang Lan, Taipei, TW;
Ming-i Wang, Taipei County, TW;
Hui-min Wu, Hsinchu County, TW;
Tzung-i Su, Yun-Lin County, TW;
Chao-an Su, Kaohsiung County, TW;
Tzung-han Tan, Taipei, TW;
Min Chen, Taipei County, TW;
Meng-jia Lin, Changhua County, TW;
Chien-Hsin Huang, Taichung, TW;
Bang-Chiang Lan, Taipei, TW;
Ming-I Wang, Taipei County, TW;
Hui-Min Wu, Hsinchu County, TW;
Tzung-I Su, Yun-Lin County, TW;
Chao-An Su, Kaohsiung County, TW;
Tzung-Han Tan, Taipei, TW;
Min Chen, Taipei County, TW;
Meng-Jia Lin, Changhua County, TW;
United Microelectronics Corp., Science-Based Industrial Park, Hsin-Chu, TW;
Abstract
A micro electro mechanical system (MEMS) structure is disclosed. The MEMS structure includes a backplate electrode and a 3D diaphragm electrode. The 3D diaphragm electrode has a composite structure so that a dielectric is disposed between two metal layers. The 3D diaphragm electrode is adjacent to the backplate electrode to form a variable capacitor together.