This inventor holds 14 USPTO granted patents and 3 EPO patents. Top assignees: Kla Tencor Corporation, Kla-Tencor Technologies Corporation, Other. Active years: 2007-2021.
Company Filing History:
7 out of 1,787 
6 out of 641 
1 out of 834,453 Years Active: 2007-2021
Title: The Innovative Contributions of Boris Golovanevsky
Introduction
Boris Golovanevsky is a notable inventor based in Haifa, Israel. He has made significant contributions to the field of metrology, holding a total of 14 patents. His work focuses on improving measurement techniques and enhancing the performance of metrology tools.
Latest Patents
One of his latest patents is titled "Direct focusing with image binning in metrology tools." This invention provides methods for capturing images of multiple layers of a region of interest (ROI) in an imaging target. The process involves binning the captured images, deriving a focus shift by comparing the layers, and calculating a focus position based on the derived focus shift. These methods are designed to be direct and can be executed in parallel with part of the overlay measurement process, resulting in faster and simpler focus measurements that enhance metrology performance.
Another significant patent is "Hot spot and process window monitoring." This invention includes metrology overlay targets and a method for monitoring process shortcomings. The targets consist of periodic structures, with at least one featuring repeating asymmetric elements along a specific segmentation direction. The asymmetry can be designed in various ways to address different types of monitored process shortcomings, such as hot spots and line edge shortening. The results from these measurements can be utilized to improve processes and increase the accuracy of metrology measurements.
Career Highlights
Boris has worked with prominent companies in the industry, including KLA-Tencor Corporation and KLA-Tencor Technologies Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas in metrology.
Collaborations
Throughout his career, Boris has collaborated with notable individuals such as Michael E. Adel and Walter Dean Mieher. These collaborations have contributed to the advancement of his inventions and the overall field of metrology.
Conclusion
Boris Golovanevsky's contributions to metrology through his innovative patents and collaborations highlight his significant impact on the industry. His work continues to influence the development of advanced measurement techniques and tools.