IDiyas

For the Inventor, By the Inventor

Haifa, Israel

Boris Golovanevsky

USPTO Granted Patents = 14

 

Average Co-Inventor Count = 2.3

ph-index = 8

Forward Citations = 166(Granted Patents)


Company Filing History:

goldMedal7 out of 1,787 
 
Kla Tencor Corporation
 patents
silverMedal6 out of 641 
 
Kla-tencor Technologies Corporation
 patents
bronzeMedal1 out of 832,680 
Other
 patents

Years Active: 2007-2021

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14 patents (USPTO):Explore Patents
1. 10897566 - Direct focusing with image binning in metrology tools (2021-01-19),
2. 10755016 - Hot spot and process window monitoring (2020-08-25),
3. 10354035 - Hot spot and process window monitoring (2019-07-16),
4. 9970886 - Metrology tool stage configurations and operation methods (2018-05-15),
5. 9581430 - Phase characterization of targets (2017-02-28),
6. 9546946 - Metrology target indentification, design and verification (2017-01-17),
7. 8908175 - Flexible scatterometry metrology system and method (2014-12-09),
8. 8804111 - Multichip CCD camera inspection system (2014-08-12),
9. 7933016 - Apparatus and methods for detecting overlay errors using scatterometry (2011-04-26),
10. 7804994 - Overlay metrology and control method (2010-09-28),
11. 7663753 - Apparatus and methods for detecting overlay errors using scatterometry (2010-02-16),
12. 7616313 - Apparatus and methods for detecting overlay errors using scatterometry (2009-11-10),
13. 7298481 - Apparatus and methods for detecting overlay errors using scatterometry (2007-11-20),
14. 7277172 - Measuring overlay and profile asymmetry using symmetric and anti-symmetric scatterometry signals (2007-10-02),
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