The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 09, 2014
Filed:
Sep. 13, 2006
Daniel Kandel, Aseret, IL;
Michael Adel, Zichron Ya'akov, IL;
Joel Seligson, Misgav, IL;
Boris Golovanevsky, Haifa, IL;
Daniel Kandel, Aseret, IL;
Michael Adel, Zichron Ya'akov, IL;
Joel Seligson, Misgav, IL;
Boris Golovanevsky, Haifa, IL;
KLA-Tencor Corporation, Milpitas, CA (US);
Abstract
A scatterometry tool including an illumination source for directing a light beam into a first optical beam shaping and positioning element at an illumination pupil plane of the tool where the light beam is modulated and directed to an objective lens system having a high numerical aperture. The objective receiving the modulated light beam and directing it onto a target to generate a scattering signal. The objective lens collects the scattering signal and directs it to a second optical beam shaping and positioning element at a collection pupil plane where the signal is modulated and then directed to detectors for receiving and processing the signal to determine surface characteristics of the target.