The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 2017
Filed:
Mar. 28, 2014
Applicant:
Kla-tencor Corporation, Milpitas, CA (US);
Inventors:
Boris Golovanevsky, Haifa, IL;
Noam Sapiens, Cupertino, CA (US);
Assignee:
KLA-Tencor Corporation, Milpitas, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
A61F 11/06 (2006.01); G10K 11/16 (2006.01); H03B 29/00 (2006.01); G01N 21/01 (2006.01); G01N 21/95 (2006.01);
U.S. Cl.
CPC ...
G01N 21/01 (2013.01); G01N 21/9501 (2013.01); G01N 2201/025 (2013.01);
Abstract
Metrology tools are provided, which comprise both active and passive vibration isolation devices, passive or active isolation systems such as constrained layer dampers, particle impact dampers or liquid impact dampers, and/or noise cancellation transducers, combined in different supporting structures of the metrology tool to dampen and reduce vibrations at a wide range of frequencies and intensities, and to which frequency range spectral analysis and optimization may be applied to determine specific tool configurations according to the provided principles.