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For the Inventor, By the Inventor

St. Petersburg, FL, United States of America

Unaxis USA Inc.


USPTO Granted Patents = 17


Trademarks = 1

Forward Citations = 159

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17 inventors (with patents filed for the assignee):

goldMedal Russell Westerman (9 out of 48 patents)

silverMedal David J Johnson (8 out of 37 patents)

bronzeMedal Shouliang Lai (4 out of 6 patents)

4.  Piero Sferlazzo (3 out of 21 patents)

5.  Boris Kobrin (2 out of 43 patents)

6.  Chunghsin Lee (2 out of 26 patents)

7.  Christopher Constantine (2 out of 5 patents)

8.  Dogan Gunes (1 out of 8 patents)

9.  Jian Zhang (1 out of 32 patents)

10.  Jason Plumhoff (1 out of 5 patents)

11.  Mike Teixeira (1 out of 1 patent)

12.  Mark D Kenney (1 out of 3 patents)

13.  Kenneth J Bures (1 out of 1 patent)

14.  Jing Pan (1 out of 1 patent)

15.  David G Lishan (1 out of 2 patents)


17 patents:

1. 7381650 - Method and apparatus for process control in time division multiplexed (TDM) etch processes (2008-06-03),
2. 7115520 - Method and apparatus for process control in time division multiplexed (TDM) etch process (2006-10-03),
3. 7101805 - Envelope follower end point detection in time division multiplexed processes (2006-09-05),
4. 7008877 - Etching of chromium layers on photomasks utilizing high density plasma and low frequency RF bias (2006-03-07),
5. 6982175 - End point detection in time division multiplexed etch processes (2006-01-03),
6. 6924235 - Sidewall smoothing in high aspect ratio/deep etching using a discrete gas switching method (2005-08-02),
7. 6905626 - Notch-free etching of high aspect SOI structures using alternating deposition and etching and pulsed plasma (2005-06-14),
8. 6846747 - Method for etching vias (2005-01-25),
9. 6771482 - Perimeter seal for backside cooling of substrates (2004-08-03),
10. 6718076 - Acousto-optic tunable filter with segmented acousto-optic interaction region (2004-04-06),
11. 6669824 - Dual-scan thin film processing system (2003-12-30),
12. 6646753 - In-situ thickness and refractive index monitoring and control system for thin film deposition (2003-11-11),
13. 6605519 - Method for thin film lift-off processes using lateral extended etching masks and device (2003-08-12),
14. 6547975 - Magnetic pole fabrication process and device (2003-04-15),
15. 6544696 - Embedded attenuated phase shift mask and method of making embedded attenuated phase shift mask (2003-04-08),
Unaxis USA Inc. is a leading technology company specializing in the development and manufacturing of advanced solutions for the semiconductor, electronics, and optical industries. With a strong focus on innovation and customer satisfaction, Unaxis USA Inc. is dedicated to providing cutting-edge technology and superior products to global clients. Our expertise includes precision optics, vacuum coating systems, electronics manufacturing, and advanced materials processing. Visit our website to learn more about our comprehensive range of products and services.
This text is generated by artificial intelligence and may not be accurate.

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USPTO Data Jan 1 1976 - Dec 30 2025

17 Patents

#18 in St. Petersburg, FL

#498 in Florida

#18,334 in US

#34,861 in the World

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St. Petersburg, FL, United States of America

Unaxis USA Inc.

Forward Citations = 159

17 inventors:

goldMedal Russell Westerman (9 out of 48 patents)

silverMedal David J Johnson (8 out of 37 patents)

bronzeMedal Shouliang Lai (4 out of 6 patents)

4.  Piero Sferlazzo (3 out of 21 patents)

5.  Boris Kobrin (2 out of 43 patents)

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