For the Inventor, By the Inventor

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St. Petersburg, FL, United States of America

Unaxis USA Inc.

USPTO Granted Patents = 17

% Expired Patents = 23.5

EPO Patents = 8

Forward Citations = 159

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17 inventors (with patents filed for the assignee):

Russell Westerman (9 out of 49 patents)

David J Johnson (8 out of 37 patents)

Shouliang Lai (4 out of 6 patents)

4. Piero Sferlazzo (3 out of 21 patents)

5. Boris Kobrin (2 out of 43 patents)

6. Chunghsin Lee (2 out of 26 patents)

7. Christopher Constantine (2 out of 5 patents)

8. Dogan Gunes (1 out of 8 patents)

9. Jian Zhang (1 out of 32 patents)

10. Jason Plumhoff (1 out of 5 patents)

11. Mike Teixeira (1 out of 1 patent)

12. Mark D Kenney (1 out of 3 patents)

13. Kenneth J Bures (1 out of 1 patent)

14. Jing Pan (1 out of 1 patent)

15. David G Lishan (1 out of 2 patents)

17 patents: Sort by Forward Citations

1. 7381650 - Method and apparatus for process control in time division multiplexed (TDM) etch processes (2008-06-03),

2. 7115520 - Method and apparatus for process control in time division multiplexed (TDM) etch process (2006-10-03),

3. 7101805 - Envelope follower end point detection in time division multiplexed processes (2006-09-05),

4. 7008877 - Etching of chromium layers on photomasks utilizing high density plasma and low frequency RF bias (2006-03-07),

5. 6982175 - End point detection in time division multiplexed etch processes (2006-01-03),

6. 6924235 - Sidewall smoothing in high aspect ratio/deep etching using a discrete gas switching method (2005-08-02),

7. 6905626 - Notch-free etching of high aspect SOI structures using alternating deposition and etching and pulsed plasma (2005-06-14),

8. 6846747 - Method for etching vias (2005-01-25),

9. 6771482 - Perimeter seal for backside cooling of substrates (2004-08-03),

10. 6718076 - Acousto-optic tunable filter with segmented acousto-optic interaction region (2004-04-06),

11. 6669824 - Dual-scan thin film processing system (2003-12-30),

12. 6646753 - In-situ thickness and refractive index monitoring and control system for thin film deposition (2003-11-11),

13. 6605519 - Method for thin film lift-off processes using lateral extended etching masks and device (2003-08-12),

14. 6547975 - Magnetic pole fabrication process and device (2003-04-15),

15. 6544696 - Embedded attenuated phase shift mask and method of making embedded attenuated phase shift mask (2003-04-08),

Company Overview

Unaxis USA Inc., located in St. Petersburg, FL, specializes in advanced technology solutions, particularly in the fields of vacuum coating and thin film deposition. The company is known for its innovative approaches to surface engineering, providing equipment and services that enhance the performance and durability of various materials. With a focus on sectors such as electronics, optics, and solar energy, Unaxis USA Inc. plays a significant role in developing cutting-edge technologies that meet the evolving needs of its global clientele.

Profile summary synthesized from public USPTO records and patent filings.

Company Badge

USPTO Data Jan 1 1976 - Oct 20 2026

17 Patents

#15 in St. Petersburg, FL

#508 in Florida

#18,903 in US

#35,948 in the World

St. Petersburg, FL, United States of America

Unaxis USA Inc.

Forward Citations = 159

17 inventors:

Russell Westerman (9 out of 49 patents)

David J Johnson (8 out of 37 patents)

Shouliang Lai (4 out of 6 patents)

4. Piero Sferlazzo (3 out of 21 patents)

5. Boris Kobrin (2 out of 43 patents)

IDiyas Innovation Intelligence. (2026). Company Patent Portfolio: Unaxis USA Inc.. Retrieved from https://idiyas.com/company/unaxis-usa

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

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