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St. Petersburg, FL, United States of America

Unaxis USA Inc.

USPTO Granted Patents = 17

% Expired Patents = 23.5

EPO Patents = 8

Forward Citations = 159

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17 inventors (with patents filed for the assignee):

Russell Westerman (9 out of 49 patents)

David J Johnson (8 out of 37 patents)

Shouliang Lai (4 out of 6 patents)

4. Piero Sferlazzo (3 out of 21 patents)

5. Boris Kobrin (2 out of 43 patents)

6. Chunghsin Lee (2 out of 26 patents)

7. Christopher Constantine (2 out of 5 patents)

8. Dogan Gunes (1 out of 8 patents)

9. Jian Zhang (1 out of 32 patents)

10. Jason Plumhoff (1 out of 5 patents)

11. Mike Teixeira (1 out of 1 patent)

12. Mark D Kenney (1 out of 3 patents)

13. Kenneth J Bures (1 out of 1 patent)

14. Jing Pan (1 out of 1 patent)

15. David G Lishan (1 out of 2 patents)

17 patents: Sort by Forward Citations

1. 7381650 - Method and apparatus for process control in time division multiplexed (TDM) etch processes (2008-06-03),

2. 7115520 - Method and apparatus for process control in time division multiplexed (TDM) etch process (2006-10-03),

3. 7101805 - Envelope follower end point detection in time division multiplexed processes (2006-09-05),

4. 7008877 - Etching of chromium layers on photomasks utilizing high density plasma and low frequency RF bias (2006-03-07),

5. 6982175 - End point detection in time division multiplexed etch processes (2006-01-03),

6. 6924235 - Sidewall smoothing in high aspect ratio/deep etching using a discrete gas switching method (2005-08-02),

7. 6905626 - Notch-free etching of high aspect SOI structures using alternating deposition and etching and pulsed plasma (2005-06-14),

8. 6846747 - Method for etching vias (2005-01-25),

9. 6771482 - Perimeter seal for backside cooling of substrates (2004-08-03),

10. 6718076 - Acousto-optic tunable filter with segmented acousto-optic interaction region (2004-04-06),

11. 6669824 - Dual-scan thin film processing system (2003-12-30),

12. 6646753 - In-situ thickness and refractive index monitoring and control system for thin film deposition (2003-11-11),

13. 6605519 - Method for thin film lift-off processes using lateral extended etching masks and device (2003-08-12),

14. 6547975 - Magnetic pole fabrication process and device (2003-04-15),

15. 6544696 - Embedded attenuated phase shift mask and method of making embedded attenuated phase shift mask (2003-04-08),

Unaxis USA Inc. is a leading technology company specializing in the development and manufacturing of advanced solutions for the semiconductor, electronics, and optical industries. With a strong focus on innovation and customer satisfaction, Unaxis USA Inc. is dedicated to providing cutting-edge technology and superior products to global clients. Our expertise includes precision optics, vacuum coating systems, electronics manufacturing, and advanced materials processing. Visit our website to learn more about our comprehensive range of products and services.

Profile summary based on public USPTO records.

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USPTO Data Jan 1 1976 - Sep 29 2026

17 Patents

#15 in St. Petersburg, FL

#507 in Florida

#18,865 in US

#35,857 in the World

St. Petersburg, FL, United States of America

Unaxis USA Inc.

Forward Citations = 159

17 inventors:

Russell Westerman (9 out of 49 patents)

David J Johnson (8 out of 37 patents)

Shouliang Lai (4 out of 6 patents)

4. Piero Sferlazzo (3 out of 21 patents)

5. Boris Kobrin (2 out of 43 patents)

Please report any incorrect information to [email protected]

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