Company Filing History:
Years Active: 2000-2004
Title: The Innovative Mind of Mark D Kenney
Introduction: Mark D Kenney is a prominent inventor based in Safety Harbor, FL, whose contributions to technology are showcased through his three patents. His work primarily focuses on enhancing substrate processing in various applications, making significant strides in the fields of manufacturing and materials science.
Latest Patents: Among his notable inventions, two stand out. The first is a patent for a **Perimeter Seal for Backside Cooling of Substrates**, which describes an apparatus designed to create a seal around a substrate support within a processing chamber. The innovative corrugated design enhances clamping forces from either electrostatic or mechanical clamps, thus ensuring effective sealing of substrates, such as wafers, during processing. The second invention is a **Rotating Magnet Array and Sputter Source**. This patent outlines a sputtering system characterized by a unique magnet array that facilitates the deposition of metal and metal-reactive gas coatings. The closed-loop magnetic path, formed by a double-lobe structure, optimizes coating processes on substrates at high rates, demonstrating Kenney’s commitment to improving deposition techniques.
Career Highlights: Throughout his career, Mark D Kenney has worked with esteemed companies, including Plasma-Therm, Inc. His experience in these organizations has played a significant role in shaping his innovative capabilities and understanding of substrate processing technologies.
Collaborations: Mark has collaborated with talented individuals in the field, including Richard C Lenoir and Edmond A Richards. Their collective expertise has undoubtedly contributed to the advancement of the technologies Kenney has developed.
Conclusion: Mark D Kenney stands as a testament to the power of innovation in the technological landscape. With three patents to his name and a strong background in substrate processing, he continues to push the boundaries of what is possible within his field. His contributions not only advance technology but also inspire future inventors to explore and innovate.