Other

Plasma-therm, Inc.

Unaxis USA Inc.

Mark D Kenney

David J Johnson

Shinzo Onishi

Edmond A Richards

David G Lishan

Paul R Fournier

Abdul Lateef

Richard C Lenoir

An apparatus, typically a sealing member extending around the periphery of a substrate support or chuck, seals an individual substrate with respect to a substrate support, typically in a processing chamber. The seal is of a corrugated shape, that enhances clamping forces, typically from electrostatic or mechanical clamps, to provide a seal between it and the substrate, for example a wafer.

Perimeter seal for backside cooling of substrates

A sputtering system and magnet array for depositing metal and metal-reactive gas coatings onto a substrate. The magnet array is designed for use in a rotating magnetron. The magnet array includes a plurality of magnets disposed on a plate. The plurality of magnets is arranged such that a closed-loop magnetic path is formed. The shape of the magnetic path is a double-lobe structure that includes first and second lobes that are symmetric to one another about an axis in the plane of the plate that intersects the center of rotation of the plate. The magnets are arranged in several rows. A first row of magnets has a double-lobe structure that corresponds to the first and second lobes of the magnetic path. Second and third rows of magnets are arranged in the shape of rings inside the first and second lobes of the magnetic path magnetic path. The lobe structure of the magnetic path can be circular or elliptical in shape. Using this design, a metal or metal-reactive gas coating can be deposited on the surface of the substrate at a high rate.

Rotating magnet array and sputter source

The trigger cover includes a housing having a clamp for secure attachment to the trigger guard of a firearm. Within the housing is an electrical circuit having a receiver energized by movement of a motion sensor. The receiver is coupled to a central processing unit which, upon receiving a signal from a remote transmitter, will energize a motor or solenoid to permit the spring-driven motion of a pair of guard plates which normally block access to the firearm trigger. The transmitter of the predetermined radio code may be worn as part of a piece of jewelry.

Trigger cover for firearm

Growing community of inventors

Safety Harbor, FL, United States of America

Mark D Kenney