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St. Petersburg, FL, United States of America

Plasma-Therm, Inc.

Calculating rank

USPTO Granted Patents = 41

EPO Patents = 16

Trademarks = 8

Forward Citations = 244

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39 inventors (with patents filed for the assignee):

Russell Westerman (34 out of 49 patents)

Linnell Martinez (28 out of 33 patents)

David Pays-Volard (27 out of 27 patents)

4. Gordon M Grivna (23 out of 220 patents)

5. Chris Johnson (23 out of 23 patents)

6. David J Johnson (23 out of 37 patents)

7. Rich Gauldin (8 out of 8 patents)

8. Dwarakanath Geerpuram (4 out of 4 patents)

9. Tsu-Wu Chiang (3 out of 3 patents)

10. Thierry Lazerand (3 out of 3 patents)

11. Leslie Michael Lea (2 out of 2 patents)

12. Peter Falvo (2 out of 2 patents)

13. Jason Michael Doub (2 out of 4 patents)

14. Ken Mackenzie (2 out of 3 patents)

15. Edmond A Richards (2 out of 2 patents)

Core Competencies:

Plasma Dicing

Semiconductor Wafer

Protective Coating

Ion Filter

Die Attach Film

Conductive Seal Ring

Electrostatic Chuck

Morphed Processing

Rotating Magnet Array

Sputter Source

Etching Process

Substrate Dicing

41 patents: Sort by Forward Citations

1. 12489018 - Method and apparatus for plasma dicing a semi-conductor wafer (2025-12-02),

2. 11908741 - Protective coating for plasma dicing (2024-02-20),

3. 11747494 - Ion filter using aperture plate with plurality of zones (2023-09-05),

4. 11651999 - Method and apparatus for plasma dicing a semi-conductor wafer (2023-05-16),

5. 11587834 - Protective coating for plasma dicing (2023-02-21),

6. 11488865 - Method and apparatus for plasma dicing a semi-conductor wafer (2022-11-01),

7. 11075057 - Device for treating an object with plasma (2021-07-27),

8. 10943825 - Method for dicing die attach film (2021-03-09),

9. 10818552 - Method and apparatus for plasma dicing a semi-conductor wafer (2020-10-27),

10. 10767257 - Method for removing a metal deposit arranged on a surface in a chamber (2020-09-08),

11. 10741447 - Method and apparatus for plasma dicing a semi-conductor wafer (2020-08-11),

12. 10707060 - Method and apparatus for plasma dicing a semi-conductor wafer (2020-07-07),

13. 10573557 - Method and apparatus for plasma dicing a semi-conductor wafer (2020-02-25),

14. 10497621 - Method for dicing a substrate with back metal (2019-12-03),

15. 10297427 - Method and apparatus for plasma dicing a semi-conductor wafer (2019-05-21),

Company Overview

Plasma-Therm, Inc. is a leading provider of advanced plasma processing solutions, specializing in technologies that enhance semiconductor manufacturing and materials processing. Based in St. Petersburg, Florida, the company focuses on innovative applications such as plasma dicing, protective coatings, and ion filtering. Their expertise extends to die attach films and metal deposit removal, catering to the evolving needs of the semiconductor industry. Plasma-Therm's commitment to research and development positions it at the forefront of plasma treatment technologies.

Profile summary synthesized from public USPTO records and patent filings.

Company Badge

USPTO Data Jan 1 1976 - Nov 3 2026

41 Patents

#6 in St. Petersburg, FL

#195 in Florida

#8,452 in US

#16,732 in the World

St. Petersburg, FL, United States of America

Plasma-Therm, Inc.

Forward Citations = 244

39 inventors:

Russell Westerman (34 out of 49 patents)

Linnell Martinez (28 out of 33 patents)

David Pays-Volard (27 out of 27 patents)

4. Gordon M Grivna (23 out of 220 patents)

5. Chris Johnson (23 out of 23 patents)

IDiyas Innovation Intelligence. (2026). Company Patent Portfolio: Plasma-Therm, Inc.. Retrieved from https://idiyas.com/company/plasma-therm

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]

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