The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 27, 2021
Filed:
Jan. 13, 2018
Plasma-therm, Llc, St. Petersburg, FL (US);
Gilles Baujon, Paris, FR;
Emmanuel Guidotti, Paris, FR;
Yannick Pilloux, Perthes, FR;
Patrick Rabinzohn, Fillinges, FR;
Julien Richard, Gif-sur-Yvettes, FR;
Marc Segers, Les Ulis, FR;
Vincent Girault, Vernouillet, FR;
Plasma-Therm LLC, St. Petersburg, FL (US);
Abstract
A system for treating an object with plasma includes a vacuum processing chamber having a holder on which the object to be treated is placed, at least two subassemblies each including at least one plasma source able to generate a plasma and being supplied with radio-frequency power Pi and with a gas i of independent flow rate ni. The plasma generated by one of the subassemblies is a partially ionized gas or gas mixture of different chemical nature from the plasma generated by the other subassembly or subassemblies. A process for selectively treating a composite object employing such a device is described.