This inventor holds 2 USPTO granted patents and 3 published patent applications and 3 EPO patents. Top assignee: Plasma-Therm, Inc.. Active years: 2021-2023.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2021-2023
Title: Innovations of Leslie Michael Lea
Introduction
Leslie Michael Lea is an accomplished inventor based in East Hagbourne, GB. He has made significant contributions to the field of plasma technology, holding two patents that showcase his innovative approach to ion filtering and substrate processing.
Latest Patents
One of his latest patents is titled "Ion filter using aperture plate with plurality of zones." This invention provides a method for using ion filtering to adjust the number of ions delivered to a substrate. The process involves a chamber connected to a plasma source, where a substrate is supported and processed using a plasma generated from the source. An electrical bias source is connected to an aperture plate, allowing for variable bias voltage application during substrate processing. This method can also include a plasma time division multiplex process that alternates between deposition and etching on the substrate.
Another notable patent is the "Method for dicing die attach film." This invention outlines a method for dicing a substrate on a composite film. It involves a workpiece with a support film, frame, and substrate, where the substrate has die and street regions. The method includes etching substrate material from the street region to expose a portion of the composite film, followed by a two-step etching process to prepare the substrate for further applications.
Career Highlights
Leslie Michael Lea is currently associated with Plasma-Therm, Inc., a company known for its advanced plasma processing technology. His work at Plasma-Therm has allowed him to develop innovative solutions that enhance substrate processing techniques.
Collaborations
Throughout his career, Leslie has collaborated with notable colleagues, including Russell Westerman and Linnell Martinez, who contribute to the dynamic environment of innovation at Plasma-Therm.
Conclusion
Leslie Michael Lea's contributions to the field of plasma technology through his patents demonstrate his commitment to advancing substrate processing methods. His work continues to influence the industry and inspire future innovations.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile