Company Filing History:
Years Active: 2015-2016
Title: Innovations by Thierry Lazerand
Introduction
Thierry Lazerand is a notable inventor based in St. Petersburg, FL, who has made significant contributions to the field of semiconductor processing. With a total of three patents to his name, Lazerand's work focuses on advanced methods for plasma dicing of semiconductor wafers.
Latest Patents
Lazerand's latest patents include a method and apparatus for plasma dicing a semiconductor wafer. This invention provides a method for plasma processing a substrate, which involves several steps. The process includes providing a process chamber with a wall, a plasma source adjacent to the wall, and a work piece support within the chamber. The work piece, which has a support film, a frame, and the substrate, is loaded onto the support. The invention also details generating plasma using the plasma source and processing the work piece with the generated plasma. Another patent by Lazerand also focuses on plasma dicing a substrate, outlining a similar process with specific steps for etching the work piece through the generated plasma.
Career Highlights
Lazerand is currently employed at Plasma-Therm, Inc., where he continues to innovate in the field of semiconductor technology. His work has been instrumental in advancing the methods used in plasma processing, which is crucial for the manufacturing of semiconductor devices.
Collaborations
Lazerand has collaborated with notable coworkers such as David Pays-Volard and Linnell Martinez, contributing to a dynamic work environment that fosters innovation and creativity.
Conclusion
Thierry Lazerand's contributions to the field of semiconductor processing through his patents and work at Plasma-Therm, Inc. highlight his role as a significant inventor in the industry. His innovative methods for plasma dicing are paving the way for advancements in semiconductor technology.