The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2020
Filed:
Mar. 02, 2018
Plasma-therm Llc, St. Petersburg, FL (US);
Linnell Martinez, Lakeland, FL (US);
David Pays-Volard, St. Petersburg, FL (US);
Chris Johnson, St. Petersburg, FL (US);
David Johnson, Cleveland, GA (US);
Russell Westerman, Land O' Lakes, FL (US);
Gordon M. Grivna, Mesa, AZ (US);
Plasma-Therm LLC, St. Petersburg, FL (US);
Abstract
The present invention provides a method for plasma dicing a substrate. The method comprising providing a process chamber having a wall; providing a plasma source adjacent to the wall of the process chamber; providing a work piece support within the process chamber; placing the substrate onto a support film on a frame to form a work piece work piece; loading the work piece onto the work piece support; providing a clamping electrode for electrostatically clamping the work piece to the work piece support; providing a mechanical partition between the plasma source and the work piece; generating a plasma through the plasma source; and etching the work piece through the generated plasma.