Company Filing History:
Years Active: 2019-2023
Title: Innovations of Tsu-Wu Chiang
Introduction
Tsu-Wu Chiang is a notable inventor based in Milpitas, California. He has made significant contributions to the field of semiconductor technology, holding three patents to his name. His work focuses on innovative methods that enhance the efficiency and effectiveness of semiconductor processing.
Latest Patents
One of Tsu-Wu Chiang's latest patents is titled "Method and apparatus for plasma dicing a semi-conductor wafer." This invention provides a method for plasma dicing a substrate, which includes a top surface and a bottom surface. The top surface features a plurality of street areas and at least one device structure. The substrate is placed onto a support film on a frame to form a work piece. A process chamber equipped with a plasma source is utilized, where a work piece support is provided within the chamber. The work piece is then placed onto this support, and a plasma is generated from the plasma source. The work piece undergoes processing using the generated plasma and a byproduct from the support film while the film is exposed to the plasma.
Career Highlights
Tsu-Wu Chiang has established himself as a key figure in the semiconductor industry through his innovative approaches. His work at Plasma-Therm, Inc. has allowed him to develop cutting-edge technologies that are essential for modern semiconductor manufacturing.
Collaborations
Tsu-Wu Chiang collaborates with various professionals in his field, including his coworker Russell Westerman. Their combined expertise contributes to the advancement of semiconductor technologies.
Conclusion
Tsu-Wu Chiang's contributions to the semiconductor industry through his patents and innovative methods highlight his importance as an inventor. His work continues to influence the field and drive advancements in technology.