Average Co-Inventor Count = 2.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Plasma-therm, Inc. (3 from 41 patents)
3 patents:
1. 11651999 - Method and apparatus for plasma dicing a semi-conductor wafer
2. 10818552 - Method and apparatus for plasma dicing a semi-conductor wafer
3. 10269641 - Method and apparatus for plasma dicing a semi-conductor wafer