Company Filing History:
Years Active: 2014-2015
Title: Dwarakanath Geerpuram: Innovator in Plasma Technology
Introduction
Dwarakanath Geerpuram is an accomplished inventor based in St. Petersburg, Florida. He has made significant contributions to the field of semiconductor processing with a total of four patents to his name. His work focuses on innovative methods and apparatuses that enhance the efficiency and effectiveness of plasma dicing techniques.
Latest Patents
Among his latest patents are two notable inventions:
1. **Method and Apparatus for Plasma Dicing a Semi-Conductor Wafer** - This invention outlines a method for plasma processing a substrate. It involves providing a process chamber with a wall, a plasma source adjacent to the wall, and a work piece support within the chamber. The process includes loading a work piece onto the support, which includes a support film, a frame, and the substrate. A cover ring with perforated and non-perforated regions is also part of this innovative setup. The method generates plasma using the plasma source and processes the work piece throughout this generation.
2. **Method and Apparatus for Plasma Dicing a Substrate** - This patent focuses on plasma dicing a substrate. It consists of providing a process chamber with a wall and placing the substrate on a carrier support, forming a work piece. An intermediate ring is placed between the substrate and the frame, and the work piece is loaded onto the work piece support. The method generates plasma through the plasma source and utilizes this plasma to etch the work piece effectively.
Career Highlights
Dwarakanath Geerpuram's inventive endeavors have been primarily conducted at Plasma-Therm, Inc., where he has played a vital role in advancing plasma technology. His contributions in developing innovative solutions have established him as a leader in his field. His patents reflect his commitment to advancing semiconductor processing techniques, contributing greatly to the industry's evolution.
Collaborations
Throughout his career, Dwarakanath has collaborated with talented individuals such as David Pays-Volard and Linnell Martinez. These partnerships have fostered an environment of creativity and innovation, pushing the boundaries of what is possible in plasma processing technology.
Conclusion
Dwarakanath Geerpuram stands out as a significant inventor in the realm of plasma technology, with his innovative patents aimed at improving semiconductor manufacturing processes. His work continues to inspire and shape the future of the industry, highlighting the importance of creativity and collaboration in driving technological advancements.