The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2020
Filed:
Jan. 16, 2017
Applicant:
Kobus Sas, Montbonnot-Saint-Martin, FR;
Inventors:
Julien Vitiello, Grenoble, FR;
Fabien Piallat, Montbonnot-Saint Martin, FR;
Assignee:
Plasma-Therm LLC, St. Petersburg, FL (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/56 (2006.01); C23C 16/44 (2006.01); C23G 5/00 (2006.01); H01J 37/32 (2006.01); C23F 1/12 (2006.01); C11D 11/00 (2006.01); C07C 45/00 (2006.01); C23C 16/455 (2006.01);
U.S. Cl.
CPC ...
C23C 14/564 (2013.01); C07C 45/00 (2013.01); C11D 11/0047 (2013.01); C23C 16/4405 (2013.01); C23F 1/12 (2013.01); C23G 5/00 (2013.01); H01J 37/32862 (2013.01); C23C 16/45525 (2013.01);
Abstract
The invention relates to a method for removing a metal deposit () arranged on a surface () in a chamber (), said method including repeatedly performing a sequence including: a) a first phase of injecting chemical species suitable for oxidizing said metal deposit (); and b) a second phase of injecting chemical species suitable for volatilizing the oxidized metal deposit, said second phase b) being performed after the first phase a).