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San Jose, CA, United States of America

Ultratech, Inc.

USPTO Granted Patents = 135

EPO Patents = 3

Trademarks = 9

Forward Citations = 1,267

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111 inventors (with patents filed for the assignee):

Andrew M Hawryluk (38 out of 64 patents)

David A Markle (24 out of 80 patents)

Serguei Anikitchev (15 out of 30 patents)

4. Yun Yu Wang (13 out of 256 patents)

5. Somit Talwar (12 out of 34 patents)

6. Boris Grek (11 out of 19 patents)

7. Ganesh Sundaram (9 out of 10 patents)

8. Arthur W Zafiropoulo (9 out of 9 patents)

9. Emily M True (8 out of 8 patents)

10. James McWhirter (8 out of 9 patents)

11. Michael O Thompson (7 out of 30 patents)

12. Romeo I Mercado (6 out of 26 patents)

13. Shiyu Zhang (6 out of 13 patents)

14. Jill Svenja Becker (6 out of 14 patents)

15. Igor Landau (5 out of 7 patents)

Core Competencies:

Atomic Layer Deposition

Laser Annealing

Heteroepitaxial Layers

Gallium Nitride Layers

Optical Systems

Silicon Germanium Transistors

Wafer Processing

Plasma Enhanced Deposition

Vapor Deposition

Defect Annealing

Focus Control

Betavoltaic Power Sources

135 patents: Sort by Forward Citations

1. 11600949 - Assembly comprising a first connector, a second connector and a coding system selectively allowing connection (2023-03-07),

2. 10468290 - Wafer chuck apparatus with micro-channel regions (2019-11-05),

3. 10353208 - High-efficiency line-forming optical systems and methods using a serrated spatial filter (2019-07-16),

4. 10351950 - Plasma enhanced ALD system (2019-07-16),

5. 10316406 - Methods of forming an ALD-inhibiting layer using a self-assembled monolayer (2019-06-11),

6. 10269662 - Scanning methods for focus control for lithographic processing of reconstituted wafers (2019-04-23),

7. 10249491 - Method and apparatus for forming device quality gallium nitride layers on silicon substrates (2019-04-02),

8. 10090153 - Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocations (2018-10-02),

9. 10083843 - Laser annealing systems and methods with ultra-short dwell times (2018-09-25),

10. 10032883 - Silicon germanium heterojunction bipolar transistor structure and method (2018-07-24),

11. 10016843 - Systems and methods for reducing pulsed laser beam profile non-uniformities for laser annealing (2018-07-10),

12. 9960036 - Method and apparatus for forming device quality gallium nitride layers on silicon substrates (2018-05-01),

13. 9935022 - Systems and methods of characterizing process-induced wafer shape for process control using CGS interferometry (2018-04-03),

14. 9929011 - Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocations (2018-03-27),

15. 9784570 - Polarization-based coherent gradient sensing systems and methods (2017-10-10),

Ultratech, Inc. is a leading provider of advanced microelectronics and semiconductor manufacturing equipment. They specialize in developing innovative solutions for the semiconductor industry, enabling their customers to produce cutting-edge microchips and electronic devices. With a strong dedication to research and development, Ultratech strives to stay at the forefront of technology and provide the most reliable and efficient equipment in the market. Visit their website to learn more about their products and services.

This text is generated by artificial intelligence and may not be accurate.

Company Badge

USPTO Data Jan 1 1976 - Dec 30 2025

135 Patents

#81 in San Jose, CA

#640 in California

#2,769 in US

#5,821 in the World

San Jose, CA, United States of America

Ultratech, Inc.

Forward Citations = 1,267

111 inventors:

Andrew M Hawryluk (38 out of 64 patents)

David A Markle (24 out of 80 patents)

Serguei Anikitchev (15 out of 30 patents)

4. Yun Yu Wang (13 out of 256 patents)

5. Somit Talwar (12 out of 34 patents)

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