The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2019
Filed:
Jul. 14, 2016
Applicant:
Ultratech, Inc., San Jose, CA (US);
Inventor:
Serguei Anikitchev, Hayward, CA (US);
Assignee:
Ultratech, Inc., San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 27/09 (2006.01); H01L 21/268 (2006.01); G02B 19/00 (2006.01);
U.S. Cl.
CPC ...
G02B 27/0983 (2013.01); G02B 19/0004 (2013.01); G02B 19/0047 (2013.01); G02B 27/0927 (2013.01); G02B 27/0988 (2013.01); H01L 21/268 (2013.01);
Abstract
High-efficiency line-forming optical systems and methods that employ a serrated aperture are disclosed. The line-forming optical system includes a laser source, a beam conditioning optical system, a first aperture device, and a relay optical system that includes a second aperture device having the serrated aperture. The serrated aperture is defined by opposing serrated blades configured to reduce intensity variations in a line image formed at an image plane as compared to using an aperture having straight-edged blades.