Speedfam-Ipec Co Ltd

Calculating rank

USPTO Granted Patents = 6

Forward Citations = 96

Loading Chart...

11 inventors (with patents filed for the assignee):

Michihiko Yanagisawa (3 out of 19 patents)

Shunji Hakomori (1 out of 18 patents)

Noriaki Mizuno (1 out of 3 patents)

4. Chikai Tanaka (1 out of 5 patents)

5. Toru Asai (1 out of 2 patents)

6. Takeshi Sadohara (1 out of 2 patents)

7. Yoshihisa Ogawa (1 out of 3 patents)

8. Mitsuru Maruya (1 out of 1 patent)

9. Kazutomo Hatano (1 out of 1 patent)

10. Akitoshi Yoshida (1 out of 16 patents)

11. Hiroaki Tanaka (1 out of 7 patents)

6 patents: Sort by Forward Citations

1. 6406589 - Processing apparatus for etching the edge of a silicon wafer (2002-06-18),

2. 6402596 - Single-side polishing method for substrate edge, and apparatus therefor (2002-06-11),

3. 6303511 - Wafer flattening process (2001-10-16),

4. 6302995 - Local etching apparatus (2001-10-16),

5. 6250997 - Processing machine (2001-06-26),

6. 6238272 - Polishing compound and a polishing method for silicon wafer (2001-05-29),

Company Overview

Speedfam-ipec Co Ltd is a leading provider of high-quality equipment and services for the semiconductor and electronics industries. With over 60 years of experience, the company offers a wide range of products including CMP systems, wafer grinding equipment, and inspection tools. Their innovative solutions help customers achieve superior results in terms of productivity and performance.

Profile summary synthesized from public USPTO records and patent filings.

Company Badge

USPTO Data Jan 1 1976 - Nov 3 2026

6 Patents

#217 in Kanagawa

#5,994 in Japan

Kanagawa, Japan