Location History:
- Ayase-shi, Kanagawa-ken, JP (2001)
- Ayase, JP (1999 - 2002)
- Sagamihara, JP (2002 - 2006)
Company Filing History:
10 out of 57 
3 out of 6 
1 out of 1 Years Active: 1999-2006
Title: Michihiko Yanagisawa: Innovator in Semiconductor Technology
Introduction
Michihiko Yanagisawa is a notable inventor based in Ayase, Japan, contributing significantly to the field of semiconductor technology. With an impressive portfolio of 19 patents, Yanagisawa has developed cutting-edge solutions that enhance the precision and efficiency of semiconductor manufacturing processes.
Latest Patents
Among his latest inventions, the "Local Dry Etching Method" stands out. This innovative method involves removing an oxide film from the surface of a semiconductor wafer before addressing any unevenness. By utilizing a nozzle that applies activated species gas with a controlled speed, this technique improves the flatness of the wafer surface effectively.
Another significant patent from Yanagisawa is the "Wafer Table for Local Dry Etching Apparatus." This invention addresses the challenge of etching rate profiles varying due to the nozzle's position relative to the wafer. By localizing the flow of activated species gas from a concentrically positioned nozzle, Yanagisawa's design ensures that unevenness is effectively removed while preventing excessive erosion of the wafer's outer edge.
Career Highlights
Throughout his career, Michihiko Yanagisawa has worked with various esteemed companies, notably Speedfam Co., Ltd. His work has contributed to advancing the technologies that are crucial for the production of high-quality semiconductor devices.
Collaborations
Yanagisawa has collaborated with talented professionals in his field, including Shinya Iida and Yasuhiro Horiike. These partnerships have been instrumental in fostering innovation and bringing new ideas to fruition, particularly in the realm of semiconductor manufacturing.
Conclusion
In summary, Michihiko Yanagisawa has made substantial contributions to semiconductor technology through his inventive approaches and various patents. His ongoing work continues to influence the industry, providing valuable solutions for enhancing manufacturing processes.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.