Location History:
- Hayakawa, Ayase-shi, JP (2000)
- Ayase-shi, JP (2000 - 2001)
- Ayase, JP (1999 - 2002)
- Kanagawa, JP (2002 - 2004)
- Tokyo, JP (1992 - 2005)
Company Filing History:
10 out of 57 
1 out of 6 
1 out of 1 Years Active: 1992-2005
Title: Shunji Hakomori: Innovator in Wafer Polishing Technology
Introduction
Shunji Hakomori is a prominent inventor based in Kanagawa, Japan. He has made significant contributions to the field of wafer polishing technology, holding a total of 18 patents. His innovative approaches have led to advancements that improve efficiency and reduce costs in semiconductor manufacturing.
Latest Patents
One of Hakomori's latest patents is a wafer edge polishing system. This system enhances throughput and lowers average processing costs by incorporating a wafer inspection unit. In this system, a wafer is polished in a dedicated unit and then transported to an inspection unit. If the inspection reveals that the polishing is inadequate, the wafer is returned for further polishing. Another notable patent is for an apparatus designed for polishing the periphery of a device wafer. This invention allows for simultaneous polishing of the inclined faces, peripheral face, and peripheral edge of the wafer, effectively removing unnecessary parts of a metallic film.
Career Highlights
Throughout his career, Hakomori has worked with Speedfam Co Ltd, where he has been instrumental in developing advanced polishing technologies. His work has significantly impacted the efficiency of semiconductor production processes.
Collaborations
Hakmori has collaborated with notable professionals in the field, including Noriaki Mizuno and Toru Asai. Their combined expertise has contributed to the success of various projects and innovations.
Conclusion
Shunji Hakomori's contributions to wafer polishing technology exemplify his innovative spirit and dedication to improving manufacturing processes. His patents and collaborations continue to influence the semiconductor industry positively.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.