1 Patents
#1 in Kanagawa-pref
#15,591 in Japan
Speedfam-pec Co Ltd
Forward Citations = 10
5 inventors:
5 inventors (with patents filed for the assignee):
Shunji Hakomori (1 out of 18 patents)
Yoshihisa Ogawa (1 out of 3 patents)
Yusuke Inoue (1 out of 1 patent)
4. Akitoshi Yoshida (1 out of 16 patents)
5. Hiroaki Tanaka (1 out of 7 patents)
1 patent: