The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2002
Filed:
Nov. 07, 2001
Applicant:
Inventors:
Assignee:
Speedfam Co., Ltd., Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 7/19 ;
U.S. Cl.
CPC ...
B24B 7/19 ;
Abstract
A pair of edge polishing members ( ) each having a recess arcked working surface ( ) are located on both sides of a diameter direction of a circular plate-shaped work ( ) which is held by a chuck means ( ) and is rotatable therewith, with the axes of the respective polishing members being inclined with respect to the axis (L) of the work ( ), in a manner such that the working surface ( ) of one edge polishing member ( ) gets in contact with the edge portion ( ) on the front side of the work ( ), while the working surface ( ) of the other edge polishing member ( ) gets in contact with the edge portion ( ) on the back side of the work ( ), thereby polishing the two edge portions ( ).