Chikai Tanaka

Title: Chikai Tanaka: Innovator in Semiconductor Technology

Introduction

Chikai Tanaka is a prominent inventor based in Ayase, Japan, known for his significant contributions to semiconductor technology. With a total of five patents to his name, Tanaka has developed innovative solutions that address critical challenges in the field of wafer processing.

Latest Patents

One of Tanaka's latest patents is a wafer table for local dry etching apparatus. This invention resolves the issue of changing etching rate profiles caused by the position of a nozzle relative to a semiconductor wafer. By blowing gas, including activated species produced by plasma, from a nozzle locally to the wafer's surface, Tanaka's design ensures accurate machining results, particularly at the outer edge of the wafer. The wafer table features an outstretched portion that prevents excessive removal of the outer edge by reflected gas. Another notable patent is a wafer etching method that incorporates hydrogen gas, ammonia gas, or a mixed gas containing these gases with sulfur hexafluoride gas. This method suppresses the occurrence of white turbidity on the wafer's surface during etching, enabling high-quality mirror polishing. The process involves generating plasma discharge from a microwave oscillator to locally etch the silicon wafer's surface.

Career Highlights

Throughout his career, Chikai Tanaka has worked with various companies, including Speedfam-Ipec Co Ltd. His expertise in semiconductor technology has made him a valuable asset in the industry, contributing to advancements in wafer processing techniques.

Collaborations

Tanaka has collaborated with notable professionals in the field, including Michihiko Yanagisawa and Shinya Iida. These collaborations have further enhanced his innovative work and contributed to the development of cutting-edge technologies.

Conclusion

Chikai Tanaka's contributions to semiconductor technology through his patents and collaborations highlight his role as a leading inventor in the industry. His innovative solutions continue to impact the field positively, paving the way for advancements in wafer processing.