Company Filing History:
Years Active: 2021-2024
Title: Yuki Yamakado: Innovator in Semiconductor Manufacturing
Introduction
Yuki Yamakado is a prominent inventor based in Toyama, Japan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 5 patents. His innovative techniques have advanced the technology used in the production of semiconductor devices.
Latest Patents
Yuki's latest patents include a method of manufacturing semiconductor devices, a substrate processing apparatus, and a recording medium. One of his notable techniques involves preparing a substrate that includes a silicon-containing film and a metal film composed of elements such as tungsten, titanium, ruthenium, and molybdenum. This method allows for the simultaneous modification of both the metal film and the silicon-containing film by supplying reactive species generated through plasma-exciting a processing gas containing hydrogen and oxygen.
Another significant patent describes a method of manufacturing a semiconductor device that includes accommodating a substrate in a process chamber. In this process, a first gas containing oxygen is supplied into the chamber, and plasma is generated by exciting this gas. A second gas containing hydrogen is then introduced, allowing for the adjustment of hydrogen concentration distribution according to the density distribution of the plasma. This innovative approach enhances the processing of the substrate with oxidizing species generated by the plasma.
Career Highlights
Yuki Yamakado is currently employed at Kokusai Electric Corporation, where he continues to develop cutting-edge technologies in semiconductor manufacturing. His work has been instrumental in improving the efficiency and effectiveness of semiconductor production processes.
Collaborations
Yuki collaborates with talented individuals in his field, including Masanori Nakayama and Katsunori Funaki. Their combined expertise fosters an environment of innovation and creativity, leading to groundbreaking advancements in semiconductor technology.
Conclusion
Yuki Yamakado's contributions to semiconductor manufacturing exemplify the spirit of innovation. His patents and collaborative efforts continue to shape the future of technology in this critical industry.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.