Company Filing History:
Years Active: 2010-2024
Title: Yuki Kataoka: Innovator in Plasma Processing Technology
Introduction
Yuki Kataoka is a prominent inventor based in Sapporo, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 6 patents. His work focuses on developing advanced systems and methods for temperature estimation and management in plasma processing environments.
Latest Patents
Kataoka's latest patents include a temperature estimation apparatus, a plasma processing system, a temperature estimation method, and a temperature estimation program. The temperature estimation apparatus is designed to successively estimate temperature data by inputting time series process data related to conditions inside a processing space where plasma processing occurs. This apparatus utilizes a pre-generated time series model to correlate process data with measured temperature data. Additionally, his learning method involves preprocessing light emission data in a plasma processing apparatus chamber, generating a regression equation that represents the relationship between the etching rate and light emission data, and selecting relevant sensor data for improved accuracy.
Career Highlights
Kataoka is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His innovative work has positioned him as a key figure in advancing plasma processing technologies.
Collaborations
Some of his notable coworkers include Tatsuya Yamaguchi and Wenling Wang, who contribute to the collaborative efforts in research and development within the company.
Conclusion
Yuki Kataoka's contributions to plasma processing technology through his patents and collaborative work highlight his role as an influential inventor in the field. His innovative approaches continue to shape advancements in temperature estimation and management systems.