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For the Inventor, By the Inventor

Sapporo, Japan

Yuki Kataoka

This inventor holds 10 USPTO granted patents and 3 published patent applications. Top assignee: Tokyo Electron Limited. Active years: 2010-2026.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Yuki Kataoka. Retrieved from https://idiyas.com/inventor/yuki-kataoka-w8ehbe9t

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Calculating rank
USPTO Granted Patents = 10 

% Patents Active = 90.0

Average Co-Inventor Count = 2.7

ph-index = 1

Forward Citations = 4(Granted Patents)


Company Filing History:

goldMedal10 out of 10,947 
 
Tokyo Electron Limited
 patents

Years Active: 2010-2026

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10 patents (USPTO):Explore Patents
1. 12707926 - Data collection system, data collection apparatus, data collection method, and data collection program (2026-08-11),
2. 12693639 - System and method for substrate processing using models at multiple layers (2026-07-28),
3. 12656746 - Management apparatus, prediction method, and prediction program (2026-06-16),
4. 12656745 - Substrate processing apparatus, data processing method, and data processing program (2026-06-16),
5. 12170193 - Temperature estimation apparatus, plasma processing system, temperature estimation method and temperature estimation program (2024-12-17),
6. 11556853 - Learning method, management device, and management program (2023-01-17),
7. 9791854 - Correction value computation device, correction value computation method, and computer program (2017-10-17),
8. 8751196 - Abnormality detection system, abnormality detection method, recording medium, and substrate processing apparatus (2014-06-10),
9. 8055372 - Processing system, processing method, and computer program (2011-11-08),
10. 7835816 - Heat processing apparatus, heat processing method, computer program and storage medium (2010-11-16),

Title: Yuki Kataoka: Innovator in Plasma Processing Technology

Introduction

Yuki Kataoka is a prominent inventor based in Sapporo, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 10 patents. His work focuses on developing advanced systems and methods for temperature estimation and management in plasma processing environments.

Latest Patents

Kataoka's latest patents include a temperature estimation apparatus, a plasma processing system, a temperature estimation method, and a temperature estimation program. The temperature estimation apparatus is designed to successively estimate temperature data by inputting time series process data related to conditions inside a processing space where plasma processing occurs. This apparatus utilizes a pre-generated time series model to correlate process data with measured temperature data. Additionally, his learning method involves preprocessing light emission data in a plasma processing apparatus chamber, generating a regression equation that represents the relationship between the etching rate and light emission data, and selecting relevant sensor data for improved accuracy.

Career Highlights

Kataoka is currently employed at Tokyo Electron Limited, a leading company in the semiconductor and electronics manufacturing industry. His innovative work has positioned him as a key figure in advancing plasma processing technologies.

Collaborations

Some of his notable coworkers include Tatsuya Yamaguchi and Wenling Wang, who contribute to the collaborative efforts in research and development within the company.

Conclusion

Yuki Kataoka's contributions to plasma processing technology through his patents and collaborative work highlight his role as an influential inventor in the field. His innovative approaches continue to shape advancements in temperature estimation and management systems.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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