The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 16, 2010
Filed:
Aug. 14, 2007
Yuki Kataoka, Sapporo, JP;
Tojo Yukio, Nirasaki, JP;
Yuki Kataoka, Sapporo, JP;
Tojo Yukio, Nirasaki, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
In a vertical-type heat processing apparatus, it is intended to stabilize the temperature of an inner wall of the reaction vessel upon loading as well as to reduce particle contamination, for example, by suppressing peeling of films attached to the inner wall. An inner wall temperature sensor is attached, in advance, to the inner wall of the reaction vessel, so as to obtain each time series data of detection values of the inner wall temperature sensor and a command value of power to be supplied to heating means. The inner wall temperature is predicted from the command value of the power obtained just before, based on the data, during an initial time of loading, so as to use the predicted value of the inner wall temperature as an object to be controlled. Thereafter, around the end time of loading, the object to be controlled is gradually changed into a temperature detection value of a temperature detecting section provided outside the reaction vessel, so as to be completely changed over time into the temperature detection value.