The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 16, 2026
Filed:
Dec. 14, 2021
Tokyo Electron Limited, Tokyo, JP;
Tsuyoshi Moriya, Tokyo, JP;
Hironori Moki, Miyagi, JP;
Yuki Kataoka, Hokkaido, JP;
Kazuya Uoyama, Hokkaido, JP;
Takahito Matsuzawa, Hokkaido, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A mechanism of predicting a change in process values with respect to a control target and using a prediction result is provided. A management apparatus includes a prediction model unit, with respect to which an input-output relationship between multivariate control values at a time T with respect to a control target and multivariate process values at a time T+ΔT with respect to the control target has been learned; and an optimization model unit configured to seek multivariate control values of the time T that minimize respective differences between the multivariate process values at the time T+ΔT output from the prediction model unit and corresponding target values, and control the control target using the multivariate control values of the time T that have been sought. The prediction model unit is configured to, in response to a request from an agent, predict multivariate process values of a time after an elapse of a time ΔT with respect to the control target in a case where the control target is controlled with designated control values, and output the multivariate process values that have been predicted to the agent, the agent managing the prediction model unit.