The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2026
Filed:
Oct. 29, 2021
Tokyo Electron Limited, Tokyo, JP;
Yuki Kataoka, Hokkaido, JP;
Hironori Moki, Miyagi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A model management system, a model management method, and a model management program that efficiently manage models applied to a substrate manufacturing process is provided. The model management system separately manages the models applied to the substrate manufacturing process in three or more layers, and includes a first management unit configured to manage a model at a predetermined layer, and one or more second management units configured to manage one or more models at a layer one level lower than the predetermined layer. The first management unit includes a calculating unit configured to, when one or more model parameters of the one or more models managed by the one or more second management units are updated, calculate a new model parameter based on each of the updated one or more model parameters, and a control unit configured to perform control so that the new model parameter is set in a plurality of models respectively managed by a plurality of management units at a lowest layer, belonging to the first management unit.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile