This inventor holds 41 USPTO granted patents, primarily in Dynamic Random Access Memory. Top assignees: Taiwan Semiconductor Manufacturing Comp. Ltd., Industrial Technology Research Institute, Semiconductor Manufacturing Company. Active years: 1995-2009.
Company Filing History:
38 out of 42,759Â 
2 out of 9,301Â 
1 out of 1Â Years Active: 1995-2009
Areas of Expertise:
Title: Innovations of Yu-Hua Lee in Microelectronics
Introduction
Yu-Hua Lee, an accomplished inventor based in Hsinchu, Taiwan, holds an impressive portfolio of 41 patents. His innovations primarily focus on advancing microelectronic fabrication processes, particularly in semiconductor manufacturing.
Latest Patents
Among his latest patents is a key-hole free process for high aspect ratio gap filling with reentrant spacer. This novel method optimizes the deposition of plasma-enhanced (PE) oxide or PE tetraethylorthosilicate (TEOS). The process involves utilizing an HDP-oxide over a polysilicon pattern, followed by etch back and plasma-enhanced silicon nitride deposition. The innovative approach ensures that the final layer of either PE-oxide or PE-TEOS is deposited without the formation of keyholes, significantly enhancing the reliability of the microelectronic structures.
Another notable patent is the laminated silicate glass layer etch stop method for fabricating microelectronic products. This method employs an undoped silicate glass layer as an etch stop when etching a doped silicate glass layer using an anhydrous hydrofluoric acid etchant. This technology is particularly beneficial for forming patterned salicide blocking dielectric layers while fabricating complementary metal oxide semiconductor (CMOS) devices.
Career Highlights
Yu-Hua Lee has held significant positions in leading organizations, including Taiwan Semiconductor Manufacturing Company Ltd. and the Industrial Technology Research Institute. His experience in these prestigious institutions has greatly contributed to his achievements in the field of microelectronics.
Collaborations
Throughout his career, Yu-Hua Lee has collaborated with notable professionals such as Cheng-Ming Wu. These partnerships have likely fostered innovation and sparked advancements in semiconductor technology.
Conclusion
Yu-Hua Lee's contributions to microelectronics and semiconductor manufacturing reflect his dedication to innovation. His extensive patent portfolio signifies his role as a key player in enhancing fabrication processes within the industry. As he continues to develop groundbreaking technologies, his influence on microelectronics will undoubtedly endure.