Inventors with similar research interests:
Location History:
- Dallas, TX (US) (1996 - 2004)
- Foster City, CA (US) (2004)
- Sunnyvale, CA (US) (2008)
- Santa Clara, CA (US) (2004 - 2011)
- San Jose, CA (US) (2005 - 2014)
Company Filing History:
32 out of 29,232 
18 out of 13,684 
Years Active: 1996-2014
Title: Innovations of Wei-Yung Hsu: A Leader in Patent Development
Introduction
Wei-Yung Hsu, a notable inventor based in Santa Clara, CA, is the proud holder of 50 patents. His extensive contributions to the field of technology, particularly in processing chamber cleaning apparatus, have significantly advanced the industry.
Latest Patents
Among his latest innovations, Hsu developed a method and apparatus for inducing turbulent flow of a processing chamber cleaning gas. This invention relates to apparatus and methods for cleaning chamber components efficiently using a specially designed cleaning plate. The cleaning plate is strategically positioned on a substrate support during the cleaning process and features multiple turbulence-inducing structures. These structures function to enhance the turbulent flow of cleaning gas while the cleaning plate is rotated, thus increasing the retention time of the cleaning gas near the showerhead. The innovative approach also minimizes concentration gradients within the cleaning plate, resulting in a more effective cleaning process. The method involves placing the cleaning plate adjacent to a showerhead and introducing cleaning gas into the space between them. The cleaning gas effectively vaporizes materials deposited on the showerhead’s surface, leading to improved cleaning results.
Career Highlights
Wei-Yung Hsu has made significant strides in his career, having worked with prestigious companies such as Texas Instruments Corporation and Applied Materials, Inc. His expertise and innovative mindset have played a vital role in his professional achievements and patent portfolio.
Collaborations
Hsu has collaborated with other talented professionals in the field, including Qi-Zhong Hong and Jiong-Ping Lu. Their combined efforts and expertise have contributed to groundbreaking advancements in technology and patent development.
Conclusion
Wei-Yung Hsu's impressive portfolio of 50 patents showcases his dedication and innovation in the technology sector. His latest inventions, particularly in cleaning chamber processes, emphasize his role as a leader in this niche industry. As technology continues to evolve, Hsu's contributions will undoubtedly leave a lasting impact.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.