Vedapuram S Achutharaman

USPTO Granted Patents = 23 (Patent Applications = 1)

Average Co-Inventor Count = 4.4

ph-index = 10

Forward Citations = 227(Granted Patents)

Location History:

Santa Clara, CA (US) (1999 - 2001)
San Jose, CA (US) (2005 - 2013)
Saratoga, CA (US) (2011 - 2023)

Company Filing History:

21 out of 13,684

Applied Materials, Inc.

Years Active: 1999-2025

where 'Filed Patents' based on already Granted Patents

23 patents (USPTO):Sort by Forward Citations

Abstract keywords

1. 12195839 - Ion beam sputtering with ion assisted deposition for coatings on chamber components (2025-01-14),

2. 11566319 - Ion beam sputtering with ion assisted deposition for coatings on chamber components (2023-01-31),

3. 11566318 - Ion beam sputtering with ion assisted deposition for coatings on chamber components (2023-01-31),

4. 11566317 - Ion beam sputtering with ion assisted deposition for coatings on chamber components (2023-01-31),

5. 11049760 - Universal process kit (2021-06-29),

6. 10109464 - Minimization of ring erosion during plasma processes (2018-10-23),

7. 9797037 - Ion beam sputtering with ion assisted deposition for coatings on chamber components (2017-10-24),

8. D797691 - Composite edge ring (2017-09-19),

9. 9725799 - Ion beam sputtering with ion assisted deposition for coatings on chamber components (2017-08-08),

10. 8497193 - Method of thermally treating silicon with oxygen (2013-07-30),

11. 8409353 - Water cooled gas injector (2013-04-02),

12. 8288683 - Fast axis beam profile shaping for high power laser diode based annealing system (2012-10-16),

13. 8110828 - Real time process monitoring and control for semiconductor junctions (2012-02-07),

14. 7972441 - Thermal oxidation of silicon using ozone (2011-07-05),

15. 7964418 - Real time process monitoring and control for semiconductor junctions (2011-06-21),

Title: The Innovative Mind of Vedapuram S. Achutharaman

Introduction: Vedapuram S. Achutharaman, based in Saratoga, California, is a distinguished inventor known for his significant contributions to the field of ion beam technology. With a remarkable portfolio of 23 patents, Achutharaman has made strides in developing advanced materials and processes that have implications in various industrial applications.

Latest Patents: Among his latest innovations, Achutharaman has patented methods for ion beam sputtering with ion-assisted deposition that focus on creating protective coatings for chamber components. The method encompasses depositing a plasma-resistant rare earth-containing film on a body surface, boasting a thickness of less than 1000 μm and porosity below 1%. Key components of the film include a combination of Yttrium Oxide (YO), Zirconium Oxide (ZrO), and Aluminum Oxide (AlO). Additionally, his work includes the development of conformal protective layers on body surfaces, with films selected from various rare earth oxide compositions, further enhancing their resilience in plasma environments.

Career Highlights: Achutharaman has held significant roles at prestigious companies, including Applied Materials, Inc. and Solyndra, LLC. His extensive experience at these organizations has allowed him to lead innovations that have shaped the semiconductor and solar industry landscapes.

Collaborations: Throughout his prolific career, Achutharaman has worked alongside notable colleagues such as Jennifer Y. Sun and Vahid Firouzdor. Their collaborative efforts have contributed to numerous advancements in the field of ion beam technology, underscoring the importance of teamwork in fostering innovation.

Conclusion: Vedapuram S. Achutharaman exemplifies the spirit of innovation through his numerous patents and contributions to advanced materials science. With his continuous exploration of ion beam technology, he is poised to influence various sectors, ensuring that his work remains impactful for years to come.

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1 patent pending:

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