The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 16, 2012
Filed:
Nov. 04, 2008
Dean Jennings, Beverly, MA (US);
Abhilash J. Mayur, Salinas, CA (US);
Timothy N. Thomas, Portland, OR (US);
Vijay Parihar, Fremont, CA (US);
Vedapuram S. Achutharaman, San Jose, CA (US);
Randhir P. S. Thakur, San Jose, CA (US);
Dean Jennings, Beverly, MA (US);
Abhilash J. Mayur, Salinas, CA (US);
Timothy N. Thomas, Portland, OR (US);
Vijay Parihar, Fremont, CA (US);
Vedapuram S. Achutharaman, San Jose, CA (US);
Randhir P. S. Thakur, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A dynamic surface anneal apparatus for annealing a semiconductor workpiece has a workpiece support for supporting a workpiece, an optical source and scanning apparatus for scanning the optical source and the workpiece support relative to one another along a fast axis. The optical source includes an array of laser emitters arranged generally in successive rows of the emitters, the rows being transverse to the fast axis. Plural collimating lenslets overlie respective ones of the rows of emitters and provide collimation along the fast axis. The selected lenslets have one or a succession of optical deflection angles corresponding to beam deflections along the fast axis for respective rows of emitters. Optics focus light from the array of laser emitters onto a surface of the workpiece to form a succession of line beams transverse to the fast axis spaced along the fast axis in accordance with the succession of deflection angles.