The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2023
Filed:
Sep. 21, 2017
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Jennifer Y. Sun, Mountain View, CA (US);
Vahid Firouzdor, San Mateo, CA (US);
Biraja Prasad Kanungo, San Jose, CA (US);
Tom K. Cho, Los Altos, CA (US);
Vedapuram S. Achutharaman, Saratoga, CA (US);
Ying Zhang, Santa Clara, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C04B 41/89 (2006.01); C04B 41/00 (2006.01); C04B 41/52 (2006.01); C04B 35/505 (2006.01); C04B 35/622 (2006.01); C04B 41/45 (2006.01); C04B 35/00 (2006.01); C23C 14/08 (2006.01); C04B 41/50 (2006.01); C23C 14/46 (2006.01); C23C 14/58 (2006.01); H01J 37/32 (2006.01); C04B 41/87 (2006.01);
U.S. Cl.
CPC ...
C23C 14/088 (2013.01); C04B 35/00 (2013.01); C04B 35/505 (2013.01); C04B 35/62222 (2013.01); C04B 41/009 (2013.01); C04B 41/4529 (2013.01); C04B 41/5045 (2013.01); C04B 41/52 (2013.01); C04B 41/87 (2013.01); C04B 41/89 (2013.01); C23C 14/08 (2013.01); C23C 14/083 (2013.01); C23C 14/46 (2013.01); C23C 14/5806 (2013.01); H01J 37/32477 (2013.01); C04B 2235/3217 (2013.01); C04B 2235/3222 (2013.01); C04B 2235/3225 (2013.01); C04B 2235/3246 (2013.01); C04B 2235/3418 (2013.01); C04B 2235/3826 (2013.01); C04B 2235/3873 (2013.01); C04B 2235/428 (2013.01); C04B 2235/445 (2013.01); Y10T 428/26 (2015.01); Y10T 428/265 (2015.01);
Abstract
An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide is selected from a group consisting of YF, ErAlO, ErAlO, and a ceramic compound comprising YAlOand a solid-solution of YO—ZrO.